Physics | Engineering internship: Multi-beam SEM performance optimization

At ASML Delft, we are developing a next-generation multi-beam scanning electron microscope (SEM) for semiconductor wafer inspection. This internship focuses on improving the imaging performance of advanced inspection systems used in semiconductor manufacturing. Due to the microscope's large field of view and shallow depth of focus, wafer surface variations can affect image quality and inspection efficiency. During this internship, you will help develop methods to better understand these effects and improve system performance. This internship offers the opportunity to combine physics, data analysis, and engineering in a highly innovative environment.

As an intern, you will contribute to the optimization of multi-beam SEM performance through calibration measurements, data analysis, and performance evaluation. You will work closely with specialists from different engineering disciplines to gain insight into electron-optical system behavior and identify opportunities for improvement. Your work will support the development of more robust inspection strategies and improved imaging performance.

• Design and execute calibration and characterization measurements;
• Analyze measurement data to evaluate imaging and system performance;
• Assess beam positioning, focus behavior, and alignment accuracy;
• Develop data-analysis workflows, visualizations, and performance metrics;
• Investigate the impact of wafer topography on imaging quality and throughput;
• Support automation of data processing and reporting activities;
• Collaborate with software, physics, and systems engineers to improve calibration methods.
• Depending on your interests and progress, the project may also include statistical modeling, algorithm development, and optimization of inspection strategies.

This is a master's non-thesis internship for minimum 5 months, minimum 5 days per week (2 days on-site). The start date of this internship is as of February/March 2027.

To be suitable for the internship, you:

• Are currently enrolled in a master's degree in Physics, Applied Physics, Electrical Engineering, Computer Science, or a related field, and have completed a bachelor's degree;
• Have a strong foundation in physics and mathematics;
• Have experience with Python for scientific programming and data analysis;
• Are analytical and able to interpret complex datasets;
• Are proactive and comfortable working both independently and within multidisciplinary teams.

This internship is ideal for students who enjoy combining theory, experiments, and data analysis to solve technical challenges. Through this internship, you will contribute directly to the development of advanced inspection technology and gain valuable experience within a leading high-tech company.

• You are enrolled at an educational institute for the entire duration of the internship, and you are at least 18 years old at the start of the internship;
• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement);
• You attach your cover letter with a clear motivation on why you are interested in this internship assignment in particular;
• You need to be located in the Netherlands to be perform your internship. In case you are currently living/studying outside of the Netherlands, your application shows the willingness to relocate.

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.